This presentation will review some of the challenges faced and technical solutions found in the development of industry-level, nanometer-precision systems for the semiconductor industry. It will focus on a maglev based system permitting 1nm of position stability, highlighting the consequences of the combined physical effects disturbing such systems in the nanometer world, and the constraints added by the industrial context.

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Bio

Samir Bouabdallah (ETEL S.A.) received his M.Sc. degree in 2001 at Abou Bakr Belkaid University Tlemcen (Algeria), and his Doctoral degree in 2006 at the Autonomous Systems Lab of the Swiss Federal Institute of Technology (EPF) Lausanne in mobile robotics. After his Ph.D. he joined ETH Zürich as postdoc where he worked on micro robotics and coordinated the European project “muFly”. In 2009 he co-founded Skybotix, a spin-off of ETHZ that won W.A de Vigier foundation prize in 2011. Since September 2011 he is research manager at ETEL S.A., a HEIDENHAIN group company active in high precision motion systems for the semiconductor industry. Samir Bouabdallah published 28 papers in the field of robotics and mechatronics. He organized several IEEE workshops and is member of the IEEE technical committee on mechanisms and design. His primary research interests are in high precision motion systems, robotics and advanced mechatronics.