Micro- and nanometer precise engineering of polymer-derived polymers (PDC) is presented and discussed for several classes of PDC materials and compared. In this talk I will show recent process optimization for PDC MEMS and NEMS devices that include novel mold filling technique enabling complex geometries at (sub-)micrometer scale including the fabrication of nano-tips. We further assessed the bio-compatibility and bio-toxicity of the developed ceramic materials and specimen in view of an use as implantable devices. The results shown are primarily from a recent PhD thesis by Jonas Grossenbacher and are issued from a collaboration with EMPA and INSEL Hospital.

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Bio

Juergen Brugger is Professor and Laboratory Director at EPFL, Switzerland with a primary affiliation in Microengineering and a secondary affiliation in Materials Science. He is active in the field of interdisciplinary and experimental micro and nanotechnologies towards integrated micro-/nanosystems with components at mesoscopic scales. In his research, he combines methods of clean-room technologies with emerging micro and nanopatterning methods, such as scanning probes, stencil lithography, inkjet printing and self-assembly, to be applied to the field of information technologies and life sciences. He has recently been appointed Chief speciality Editor of the Frontiers journal in Micro and Nanoelectromechanical Systems and is editorial board member of the IEEE journal JMEMS. He was General Chair for the Eurosensors XXIII, Lausanne, 2009, co-chair of MNE 2014, Lausanne, Switzerland and IEEE-MEMS 2015, Estoril/Portugal.